These Agilent Varian Turbo-V 1001 Navigator turbomolecular high-vacuum pumps have an ISO-200 inlet flange, having an ultimate pressure of 1x10-8 Torr, and Agilent Varian part number 9698931. The Turbo-V 1001 Navigator turbomolecular pumps have a maximize performance at minimum cost and size, with a pumping speed of 950 l/s of nitrogen (N2). We recommend a primary pump size as small as 14 CFM (e.g., Agilent Varian TriScroll 300, IDP-15, or TriScroll 600 dry scroll vacuum pumps or DS402 rotary vane vacuum pump) which can be used to operate the Turbo V 1001 in all its pumping profiles. The Turbo-V 1001 are compound pumps which include the MacroTorr drag stage technology to achieve the high-compression ratios for light gases and maximize the throughput of the pump. The Turbo V 1001 Navigator turbo pumps with ISO inlet flange have an ultimate pressure as low as 1x10-8 Torr when used correctly, for example, the ISO inlet versions of these pumps allow the intake flange to be baked up to 80 degrees Celsius. These intake flanges are ISO-K which require double claw clamps.

Agilent Varian Turbo-V 1001 Navigator turbomolecular high-vacuum pumps are integrated into many analytical instrumentation applications including Electron Microscopy (SEM, TEM), Focused Ion-beam Systems (FIB) and Surface Analysis Modern focused-beam systems such as SEM’s, TEM’s and FIB’s utilize columns that project electrons or ions onto microscopic samples for detailed analysis. End users analyze all types of substances from organic compounds to semiconductor wafers. In the Semiconductor industry, in particular, they require more sensitivity for better sample resolution. Another key requirement is high sample throughput in order to lower the cost of ownership of these instruments. Agilent Varian Turbo-V 1001 Navigator turbomolecular high-vacuum pumps are also a key component in modern focused-beam systems because they offer fast, oil-free air evacuation of large sample chambers (oil-free operation is a key requirement of many modern analysis applications such as semiconductor manufacturing).

All optional accessories, controllers and different configurations are available from us at Ideal Vacuum Products. The user’s manual and Agilent Varian Turbo V 1001 catalog brochure sections are available for download in PDF format below. Call us for all your turbo pump needs at (505) 872-0037.