Agilent Varian TPS-mobile system with TwisTorr 84 FS Turbo, ISO63 inlet, SH110 Dry Scroll Pump, Rack Controller & Mobile Cart.
Agilent Varian Part No G8701A-010-021-036-041-110-551, 9698423

These Agilent Varian TPS-mobile systems come with an Agilent 84 FS Turbo Pump (49 l/s pumping speed) with ISO63 inlet, Agilent SH110 Dry Scroll Roughing Pump and an Agilent 84 FS AG Rack Controller. They are plug and pump high and ultra high vacuum systems. Portable, fully integrated vacuum solutions, available as high capacity, with wide pumping speeds ranging down from atmosphere to UHV 1x10-9 Torr. Now with the innovative improved reliability TwisTorr FS Turbomolecular Vacuum Pumps (84FS or 304FS). We also offer the larger capacity V551 Agilent Turbo Navigator Turbo Pump.

Applications Include:

UHV System Pump Down
ION PUMP Roughing
Lamp and Tube Processing
Cryopump Regeneration
High Vacuum Systems Operation
High and Ultra High Vacuum Systems Bake Out

This Agilent Varian TPS-mobile Includes the Following Components:

Agilent Varian 84 FS TwisTorr Turbomolecular Pump, ISO63 Inlet, 49 l/s nitrogen, part number X3502-64000
Agilent Varian 84 AG FS Rack Controller, PN X3508-64001
Agilent Varian Air Cooling Fan Kit for Rack Controller, PN 9699290
Agilent Varian SH-110 Dry Scroll Roughing Pump, PN SH01101UNIV
ISO63 inlet with screen, part number X3502-68001
Mobile cart with wheels and adjustable pump heights
AC power cord, 3 meter, part number 9699958

This Agilent Varian TPS-mobile is a complete self contained vacuum system, just plug in and pump down. All that is required is the hardware and pressure gauges necessary to connect to your chamber or vacuum process.

Notes on the Agilent Varian 84 FS Turbomolecular Vacuum Pump
Agilent Varian TwisTorr 84 FS Turbo Molecular Vacuum Pump, ISO63, Inlet with Agilent Floating Suspension. These Agilent Varian TwisTorr 84 FS turbomolecular high-vacuum pumps have new and amazing improvements over the previous V-81M, V-81T turbo pumps. These improvements include the Twistorr drag stage technology and Agilent Floating Suspension. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over time. The unique bearing and dry lubrication in the Agilent TwisTorr 84 FS eliminate oil and maintenance, and permit operation of the pump in any orientation.

Agilent Varian TwisTorr turbo pumps are designed for optimum performance in real world applications and integrate well into the Agilent TPS-mobile vacuum system. These new Agilent TwisTorr 84 FS turbo pumps require minimal to no maintenance and provide protection from misuse. The Agilent Varian TwistTorr 84 FS turbo pump with ISO63 Inlet flange, has a pumping speed of 49 l/s of nitrogen, KF-16 foreline flange and ambient operating temperature from 5 °C to +35 °C. These 84 FS pumps have a start up time of <2 minutes, rotational speed 81000 rpm. The cooling requirements are a minimum of forced air when conditions are 5- 35 °C ambient air temperature or water cooling with minimum flow: 65 l/h (0.30 GPM) with water temperature between +15 °C to +25 °C at a water pressure of 45 to 75 psi. A PDF user instruction manual for the TwisTorr 84 FS turbo pump is available below for download.

Notes on the Agilent Varian 84FS AG Rack Controller
The TwisTorr 84FS AG Rack Controller is a microprocessor controlled frequency converter with new enhanced features that allow greater control and communication capabilities. It is a compact 1/4 rack unit designed for full worldwide compatibility 100-240 VAC. This controller has RS 232/485 connections, powers a cooling fan, drives vent valve controls, provides and acquires the pressure of the Agilent Varian wide range gauges and controls the pump operation parameters for the TwisTorr 84FS series turbo pumps. It also contains self diagnostic and protection features. This controller automatically recognizes the Agilent active gauges measuring down to 10-3 to 10-9 Torr. A PDF user instruction manual for the TwisTorr 84 FS AG Controller is available below for download.

Notes on the SH-110 Dry Scroll Roughing Pump
The Agilent Varian SH-110 is a dry, hermetic scroll vacuum pump that provides industry leading features, with 4.0 CFM pumping speeds and an ultimate pressure of 5x10-2 Torr. The Agilent Varian SH-110 dry scroll vacuum pump is designed for easy integration with the TPS-mobile systems. It is single stage in a compact package ideally suited for many applications including analytical instruments and research & development. The Agilent Varian SH-110 models include an integrated anti-suck back valve that closes quickly when the pump is shut off preserving a clean dry vacuum in the foreline and vacuum systems. The single sided scroll design makes the SH-110 very user friendly to maintain and install the minor tip-seal replacement kit, PN P102815 available on this website. A Silencer is available for this dry pump for a clean dry air (CDA) vacuum pumping application, where the exhaust is vented into the room. They greatly silence the exhaust of dry pumps and also collect tip seal dust. Silencers are available on this website as PN P103342 or P104623. A PDF user instruction manual for the SH-110 is available below for download.