Edwards STP-451C (Chemical Resistant) 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump, 480 l/s Pumping Speed, ISO-160K
Pump Only NO Accessories. Edwards Part Number B74851010
This listing is for the new Edwards STP-451C (Chemical Resistant) 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump. To be used with the Edwards SCU-350 Control Unit, pumping speed of 480 liters per second (l/s) of nitrogen, ISO-160K inlet flange, ISO KF-25 exhaust foreline flange, and KF-10 purge port with the corrosion model. A basic pump system would require a Edwards STP-451 pump, a SCU-350 controller, a water cooling accessory and a suitable backing roughing pump. The Edwards STP-451 turbomolecular pump offers field proven reliability for use in electron miscroscopes, scientific instruments and semiconductor applications.
The STP-451C is a series of magnetically-levitated turbomolecular pumps. The STP pump is configured so that rotor blade and the stator blade are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the
outlet port by the high speed rotation of the rotor.
The Rotor blade is supported by the magnetic bearing without mechanical contact.
Therefore the STP pump requires no lubrication oil unlike conventional turbomolecular
pumps using ball bearings.
The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is
supported in the radial direction by 2 pairs of radial direction active magnetic bearings
that consist of radial sensor and radial electromagnet. A pair of axial direction
active magnetic bearings consists of axial sensor and axial electromagnet to
support the rotor in the axial direction. Because the rotor is thus supported without
mechanical contact, it can rotate with very low vibration.
There is less heat generated from magnetic bearings because there is no friction.
Therefore the STP pump requires no cooling. However, the STP pump requires water
cooling or air cooling during baking, gas pumping or any process.
Taking into consideration a breakage of magnetic bearings, touch down bearings and
coated with solid lubrication have been installed. They do not contact the rotor
during the rated operation. A radial sensor, an axial sensor, a rotational speed sensor and a temperature sensor
always monitor the magnetic bearing as well as the rotor. If an abnormality/error
occurs, the rotor will stop.
To ensure a high level of resistance to corrosion, the corrosion resistant models STP (C) have nickel coated rotors/stators and pump internals suitable for ion implantation and plasma etching. These corrosion resistant pumps have a KF10 nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils. All accessories for this pump are available on this website or call 505-872-0037 for details. For complete specs, see graphic below or download the STP manual.pdf in AVAILABLE DOWNLOADS below.
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ITEM |
DESCRIPTION |
PART NO. |
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SCU-350 Controller, Works with STP Pumps: 301, 451, L301, L451 Series |
YT21Z0Z01 |
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Connection Cable 3 meters PS CS |
B70700010 |
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Connection Cable 5 Meters PS CS |
B70700000 |
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Connection Cable 10 Meters PS CS |
B70700130 |
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Type B Power Cable 3 Meters Ring Terminal |
B70700090 |
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Type B Power Cable 5 meters Ring Terminal Angle |
B70700040 |
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Type B Power Cable 10 meters Ring Terminal |
PT21Y0A00 |
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STP Vibration Isolator ISO-100 |
B58046000 |
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STP Vibration Isolator ISO-160 |
B58049000 |
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P021 Damper ICF152 |
B74834010 |
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P001 Damper ICF203 |
B70652040 |
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P021 Cooling Fan 100 VAC w/1 Meter Cable (P021/P039) |
YT01BA500 |
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P021 Cooling Fan 115 VAC w/1 Meter Cable |
YT011A003 |
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P021 Cooling Fan 200 VAC w/1 Meter Cable (P021/P039) |
YT011A000 |
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Water Cooling Unit RC1/4 Hose |
YT21CA001 |
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