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Home > Dry Semiconductor Vacuum Pumps > Rebuilt Semiconductor Pumps > Edwards > iQDP Series Pumps > BOC Edwards iQDP40 Dry Semiconductor DryStar Vacuum Pump Rebuilt
BOC Edwards iQDP40 Dry Semiconductor DryStar Vacuum Pump Rebuilt
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BOC Edwards iQDP40 (iQDP-40) Dry Semiconductor DryStar Vacuum Pump Rebuilt

The iQDP40 Dry pumping System is a microprocessor controlled, modular, dry pump package that provides unparalleled control and monitoring facilities. The iQ pumping system can be locally controlled by a hand held LCD control panel or remotely controlled through a fully customized tool interface. All major control elements are located within the footprint of the pumping system.The iQ dry pumping system has integrated sensors, which continuously monitor key system performance parameters and give advanced warning of problems. These pumps have pump and motor temperature sensors installed.

The iQ pumpset parameters can be monitored and displayed through a variety of output devices including: Hand-held or panel mounted control module; Local PC or laptop computer; OEM specified tool interface; PC as part of a fab-wide network. This is a hand held LCD control panel module provides access to: system control and configuration; system status and monitored values; diagnostics and recommended corrective action. A tool interface module can be used to provide a fully customized interface to your process tool. It communicates with the iQ pumping system through a screened twisted pair cable. It has integral system configuration which check process pump service history log, process/tool specific settings, updated on power-on, giving maximum pump interchangeability between process tools.

Every dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. Each pump is fully dismantled and all parts are decontaminated and inspected. Damaged or worn parts are replaced. All bearings, o-rings, seals, and gaskets are replaced. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pumps are leak tested to ensure safety during operation. Final pump is cleaned and painted as required.


Product: BOC Edwards iQDP40 Dry Semiconductor DryStar Vacuum Pump Rebuilt
Condition: Rebuilt
Warranty: 90-Days
Part Number: P101403
Sale Price: $8,995.00
QTY:   
ADDITIONAL INFORMATION:


Edwards iQDP REBUILD SERVICE Includes the Following:
Totally Disassembled and Cleaned ♦ All components measured and inspected to original factory specifications ♦ Claws and rings are relocated ♦ All seals, sleeves and bearings are replaced ♦ Temperature control valve is cleaned and adjusted ♦ Pump motor bearings are replaced ♦ Exhaust valve and silencer are cleaned and rebuilt ♦ Water flow lines are cleaned and tested ♦ Thermal Snap Switch is tested ♦ Gearbox is filled with fresh PFPE charge ♦ Safety features are tested, e.g. EMO, exhaust over pressure, pump over temp, etc. ♦ Pump performance is computer recorded ♦ Helium leak tested ♦ Test reports and quality control results are provided. ♦ If you have any questions about our rebuilding procedure or would like a quote, please call our Albuquerque, New Mexico (NM) location at 505-872-0037. Our team of skilled technicians rebuild and service pumps on a daily basis so call to schedule your pumps for rebuilding today!




APPLICATIONS for the Edwards iQDP Pumps Include the Following:
♦ SEMICONDUCTOR RESEARCH & MANUFACTURING ♦
Edwards IQ Dry Vacuum Pumps are specifically designed for subfab vacuum applications in semiconductor manufacturing processes, such as, physical and chemical vapor deposition, etch and ion implantation. Wafers are typically brought into a load-lock chamber that is pumped down with one pump, moved into a transfer chamber that is pumped with a second pump and then into the process chamber where a third pump is employed. Each pump has different requirements in terms of the number of cycles, the gas load (volume and type of gases to be pumped) and, in the process chamber, the type of byproducts generated. Edwards IQ pumps are well suited for the harshest of semiconductor processes, they have specially enhanced particulate handling capabilities. Our Edwards rebuilt dry pumps have a very small subfab footprint and large pumping speeds that enhance the latest process. They form the optimum choice for low cost of ownership in demanding service cycles.
♦ SOLAR CELL MANUFACTURING ♦

Edwards IQ Dry Vacuum Pumps are well-suited for vacuum applications in solar cell manufacturing. Like integrated circuit and flat-panel display manufacturing, solar cell manufacturing depends on a variety of vacuum-based processes, from PECVD (plasma-enhanced chemical vapor deposition) silicon deposition to lamination of the finished module. High pumping speeds and rapid chamber cycling are essential if these processes are to meet the throughput requirements of the solar cell industry. Our rebuilt Edwards IQDP Dry Vacuum Pumps are dependable with benefits that include very lower up front costs, reduced energy consumption and decreased maintenance requirements. If you have any questions about our rebuilding procedure or would like a quote, please call our Albuquerque, New Mexico (NM) location at 505-872-0037. Our team of skilled technicians rebuild and service pumps on a daily basis so call to schedule your pumps for rebuilding today!