Skip to main content
× Home Services Products Catalogs Downloads Tech Support About Contact Careers (505) 872-0037

(505) 872-0037

Shopping Cart Icon
cart
 
Login Icon
login
Ideal Vacuum XG-110 Portable Digital Thermocouple Controllers On Sale Adixen 2021C2 Pumps On Sale Agilent IDP-15 Dry Scroll Vacuum Pumps On Sale Ideal Vacuum XGC-320 Portable Digital Thermocouple Controllers On Sale Agilent TriScroll Pumps On Sale Edwards nXR Multi Stage Roots Pumps On Sale

Keyword       Ideal Vacuum Part Number       Manufacturer Part Number

× Vacuum Pumps Modular Vacuum Chambers Stainless Steel Vacuum Chambers Aluminum Vacuum Chambers ExploraVAC Unlimited Chambers ExploraVAC TVAC Test Chambers Fittings and Flanges Feedthroughs Vacuum Valves Rebuild Kits, Parts, And Motors Vacuum Fluids, Oils, and Greases Turbo Pumps And Controllers Filters Traps and Silencers Convection and Vacuum Ovens Leak Detection and RGA Vacuum Pressure Measurement Recirculating Chillers And Water Baths
Product Image 1
Product Image 2
Product Image 3

Condition:
  New
Part Number:
  P104483
Warranty:
  Agilent Warranty

Available Now:  1   Agilent Varian Turbo Purge Valve, 20 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps, PN 9699242 671.61


Sale: $671.61


×

Load

Print Version

Agilent Varian Turbo Purge Valve, 20 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps, PN 9699242


Agilent Varian Turbo Purge Valve, 20 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps.
Agilent Varian Part Number PN: 9699242.

These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9242.

Works with the following Agilent Varian turbo pumps:
  • TwisTorr 74 FS
  • TwisTorr 84 FS
  • TwisTorr 305 FS
  • TwisTorr 305-IC
  • TwisTorr 404 FS
  • TwisTorr 704 FS
  • TwisTorr 804 FS
  • Turbo-V 1001



Press ESC to Close


PDF Logo Agilent Turbo Purge Valve Installation Instructions.pdf

PDF Logo Agilent Varian Turbo Purge Valve Installation.pdf

PDF Logo Agilent Varian TwisTorr FS Turbo Vacuum Pumps Brochure.pdf

PDF Logo Agilent 305 FS TwisTorr Turbomolecular Pump User Manual.pdf

PDF Logo Agilent 305 IC TwisTorr Turbomolecular Pump User Manual.pdf

PDF Logo Agilent 305 FS AG Remote Rack Controller User Manual.pdf



You may wish to consider the following products:

Ideal Vacuum Logo Water Mark
CONTACT US
Ideal Vacuum Products, LLC
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealvac.com



Press ESC to Close


deepbox image 2